Wafer Failure Analysis
for Yield Enhancement

Introduction

Failure Analysis Approach
Problem Statement
Verify and Characterize the Failure
Failure Analysis Procedures

Yield Reduction Mechanisms

	Design
	Process

Metal Etch Polymer

Example:  Corrosion Cotton Balls

Oxide Etch Polymer

Example #1:  Open Vias
Example #2:  Onion Rings

Stringers

Example #1:  Residual Material In Crevices
Example #2:  Material Trapped Under Ledge
Example #3:  Residual Poly 2 Causes High L_eff

	Test
	Assembly

Electrical Fault Localization

Semiconductor Test Parametrics (Test Structures)
Test Binning
Curve Tracer
I_DD, I_DDQ
Shmoo Plotting
Loop on Problem Vectors

Physical Fault Localization

Mechanical Probing

Liquid Crystal Hot Spot Detection

Purpose
Theory
Device Failure Characteristics
Equipment
Hot Spot Detection Procedure
Liquid Crystal Application - A Final Result
Procedure Variations

Emission Microscopy

SEM Techniques

High Energy Passive Voltage Contrast

Sample Preparation Techniques

Non-encapsulated Cross Section Basics

Purpose
Background and Theory
Equipment
Procedure
General Comments

Wet Etch Passivation Removal

Example #1:  A Construction Overview
Example #2:  Isolation of Circuit Elements

Analytical Techniques / Contract Services

Energy Dispersive Spectroscopy (EDS)
Wavelength  Dispersive Spectroscopy (WDS)
Auger Electron Spectroscopy (AES)
Secondary Ion Mass Spectrometry (SIMS)
Fourier Transfer Infrared Spectrometry (FTIR)
X-ray Photoelectron Spectroscopy (XPS)
X-ray Fluorescence (XRF) 
Rutherford Backscattering Spectroscopy (RBS)
Scanning Tunneling Microscopy (STM)
Scanning Probe Microscopy (SPM)

Equipment Considerations - In house / Off site

Liquid Crystal Analysis

Appendices

Glossary

Resources

 

Comments, suggestions, and corrections/omissions concerning this material are encouraged and will be appreciated.  Your input will make a difference in the development of the content of this new book, Wafer Failure Analysis for Yield Enhancement.

Contact David Burgess:
Email:  davidburgess@AcceleratedAnalysis.com
Phone:  (650) 867-8443 or (650) 726-1832
Fax:  (408) 241-0547

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